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| Vacuum coating equipment |
Vacuum coating equipment mainly refers to a class of coating needs to be in a high vacuum, specifically including many species, including vacuum ion evaporation, magnetron sputtering, MBE MBE, PLD laser deposition and so are many. The main idea is to be divided into two kinds of evaporation and sputtering.
Needs to be become coated substrate, plating material is becoming a target. Same substrate and the target in a vacuum chamber.
Evaporation is generally heated to the target surface component in the form of ions or radicals is evaporated, and settled in the substrate surface by forming a thin film forming process (scatter - layered growth - Structure walking fans - island structure). For sputter coating classes, can be simply understood as the use of high energy electron or laser ablation target, and to the surface of the component to form radicals or ions are sputtered and deposited on the end surface of the substrate through the film forming process, forming a thin film .
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